• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    This invention relates to a technique for vacuum pressure measurement using a rotary viscometer vacuum gauge. The purpose of the invention is to expand the range of measured pressures. The rotation body 2 is electrically driven by coils 8a-8g connected to a generator. The signals of the following coils are fed to the computer unit by sig
    公开号:SU1421267A3
    申请号:SU853944739
    申请日:1985-08-27
    公开日:1988-08-30
    发明作者:Кристиан Фремерей Йохан；Линденау Бернд；Виттхауер Клаус
    申请人:Кернфоршунгсанлаге Юлих Гмбх (Фирма)；Рвд-Датентехник Гмбх (Фирма)；
    IPC主号:
    专利说明:

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    ABOUT)

    s
    The wire of the computing machine determines the temporary change in the frequency of rotation of the rotation body 2. Based on this change, pressure or other parameters of the gas surrounding the rotation body 2 are calculated. Near the latter, a temperature sensor 13 is connected to the converter, in which the signals from the sensor 13, the temperatures are converted to a voltage applied to the block of the expansion machine. With the help of an integrator, it is possible to make corrections of specified pressure values, 2 s, p. f-ly, 2 silt
    This invention relates to a technique for vacuum pressure measurement using a rotary viscometer vacuum gauge.
    The purpose of the invention is to expand the range of measured pressures.
    Fig. 1 shows a measuring head of a rotary rotary vacuum gauge with a spherical body of rotation, a slit; FIG. 2 shows the electrical circuit of the signals supplied to the computer unit.
    Figure 1 shows a measuring head 1 with a spherical rotating body 2, which is placed in a thin-walled metal tube 3 for connection to a vacuum system.
    The contactless arrangement of the rotational body 2, made of magnetized material, is supported by two permanent magnets 4a, 46 and two electric coils 5a, 56, as well as an electric regulator 6 with a small consumption of electric energy. Four other electric coils 7a, 76, located around the rotation body 2, dampen the lateral oscillations of the rotation body with
    The rotation body 2 is electrically driven by the driving coils 8a-8g, which are connected to the three-phase generator 9 with the switch 9 and the supply wire Eo. The rotation body is centrally located between the driving coils. To register the rotational speed of the rotational body 2, two follower tracks 10a, 106 are used as sensitive elements, in which, by means of a rotating
    0
    Q
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    A magnetizing body of rotation is induced by an electrical voltage with a synchronous rotational speed. The tracking coils are connected to the computer unit 11, which is designated in FIG. 2 as a functional unit. The signals of the tracking coils are fed to the computer unit via the signal wire 12. The computer unit determines the temporal variation of the rotation frequency of the rotation body 2, which can calculate the pressure or other parameters of the gas surrounding the body of rotation about
    A temperature sensor 13 may be located inside the head 1 in the vicinity of the rotation body 2, which in the exemplary embodiment is mounted on a metal tube 3 leading to a vacuum system. The temperature of the metal tube 3 corresponds to the measurement site with a sufficient approximation of the temperature of the gas surrounding the body of rotation, whose pressure can be measured. The temperature sensor 13 is connected by a signal wire 14 to an input of a converter 15, the output of which through a signal wire 16 leads to a computer unit 11, In converter 15, the signals (voltage U. or resistance R) of the temperature sensor 13 is converted into voltage and / applied to the computer unit As temperature sensor 13 is preferably used use one or more electric coils 7a, 76,
    In the exemplary embodiment, the electrical coil 7a, through the signal wire 17, removes the resistance R, which is converted to a voltage and is proportional to the resistance. From converter 18, signal wire 19 leads to computer unit 11 o. Coils 5a, 5c, or 8a - 8th can also be used as a resistance thermometer.
    Subsequently, as a temperature sensor, the input power of a three-phase generator 9 is removed from the converter 20 serving as a wattmeter, which is connected via a signal wire 21 to a three-phase generator 9. A voltage U proportional to the input power U l is supplied from the converter 20 is supplied to the integrator 23. The latter simulates the time delay of the temperature change with respect to the change in the strength of the three-phase generator and transmits a signal and -j corresponding to the temperature on the signal wire 24 to the computing unit 11.
    Another serving as a temperature sensor for the transducer 25 as an input value for intermittent operation registers only the relative duration of switching on 1 of a three-phase generator 9. Signal wire 26 is used in connection with a three-phase generator 9. A prerequisite for using the relative duration of switching on as a criterion of gas temperature, surrounding the body of rotation, is that the generator power in all phases of the inclusion remains constant In converter 25, the relative power the switch-on time is converted into an electrical voltage i m and through the signal wire 27 is fed to the integrator 23,
    The integrator 23 processes the voltage u, j (in the same way as the voltage. The power center transferred from the converter 25 and transmits the voltage U to the computer unit 11 o
    With the help of the integrator 23, it is possible to make corrections of the specified pressure values also by means of a sigs by the computing unit when calculating the pressure. In the signal magnitude, the use of the number of revolutions of the body during the working time of the meter 1, when the three-phase gene transmits any drive, i.e. in the off phase of the tr 10 generator. The decrease in the number is set by the integrator 23 of the blasting machine through the signal 28 o
    In the three cases after them, 15 times the correction of the values becomes possible without contact with the measuring probe.
    20
    25
    thirty
    35
    权利要求:
    Claims (1)
    [1]
    1. Method of measuring pressure using a viscometer with a contactless sensor in the measuring head of a tera by measuring the decrease in its rotational speed with unconnected or periodically turning on the drive and the subsequent pressure in the computational method differing in expanding the range of pressure, in the gauge of the gauge input A sensor of gas surrounding the body of the signal from the temperature sensor to the computing device registers the calculated magnitude according to the measurement.
    2 ° A viscosity rotary meter for measuring the pressure of a contactless body; the measuring head has a body surrounding a body of rotation and a damper, keeping it at 45; the measuring coil, under the measuring device, which extends the measurement range, a sensor for the gas surrounding the body, filled into a block, and the resistance of the windings of the dampers, the input of which is connected to the damper windings and the outlets
    40
    50
    cash that is already determined by-55; numeral device.
    1267
    with computer unit 11 for calculating pressure. The reduction in the number of revolutions of the body of rotation during the working time of the measuring head: 1, when the three-phase generator does not transmit any drive power, is used as the signal magnitude. in the off phase of a three-phase 10 generator. The reduction in the number of revolutions is set to the integrator 23 by the computer unit via the signal wire 28 o
    In three cases after them, the temperature correction of the pressure values becomes possible without all contact with the measuring head 1.
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    Invention Formula
    1. Method of pressure measurement using a viscosity rotary vacuum gauge with a rotational body suspended in a measuring head by measuring the decrease in the frequency of its rotation with continuous or periodic switching of the magnetic drive and subsequent calculation of the pressure in the computing device, characterized in that measured pressures; a sensor of temperature of the gas surrounding the body of rotation is inserted into the measuring head of a vacuum gauge; a signal from the temperature sensor is fed to a calculator Noe device and adjusting the calculated value of the pressure according to the measured temperature.
    2 ° A viscosity rotary vacuum gauge for measuring pressure, containing a rotational body suspended in the measuring head, a rotational body surrounding the rotational body, driving, damping, keeping the coil and 5; A measuring coil connected to a measuring device, characterized in that, in order to expand the range of measured pressures, a sensor of a gas surrounding the body of rotation is inserted into it, executed as a unit for measuring the resistance of the windings of the damper coils, the input of which is connected to the damper windings, and output - to you
    0
    0
    类似技术:
    公开号 | 公开日 | 专利标题
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    KR910021001A|1991-12-20|Electric motor controller
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    RU1770785C|1992-10-23|Induction motor electromagnetic moment determining device
    SU146868A1|1961-11-30|Contactless measuring instrument of time constant of microelectric motors
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    SU577431A1|1977-10-25|Vibratory viscosimeter
    GB1016720A|1966-01-12|Apparatus for measuring by measurement of phase shift
    SU1018005A1|1983-05-15|Device for checking electrical conductivity
    SU1255945A1|1986-09-07|Method of measuring amplitude of harmonic signal with infralow frequency
    SU881618A1|1981-11-15|Device for measuring asynchronous motor slip
    同族专利:
    公开号 | 公开日
    DK166048C|1993-07-12|
    EP0176735A3|1988-10-12|
    EP0176735A2|1986-04-09|
    JPH0533734B2|1993-05-20|
    AT57576T|1990-11-15|
    DE3431517A1|1986-03-06|
    US4619144A|1986-10-28|
    EP0176735B1|1990-10-17|
    DK390085D0|1985-08-27|
    JPS6161030A|1986-03-28|
    DK166048B|1993-03-01|
    DK390085A|1986-03-01|
    DE3431517C2|1986-09-04|
    CA1229241A|1987-11-17|
    DE3580149D1|1990-11-22|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    DE1573603A1|1965-06-16|1970-04-16|Fremerey Dipl Phys Johan Krist|Device for measuring the pressure in a high vacuum|
    DE2914037C2|1979-04-06|1983-12-08|Siemens AG, 1000 Berlin und 8000 München|Device for rendering ineffective deviations in the output voltage of a pressure transducer in magnetic tape recorders caused by temperature fluctuations|
    DE2945889A1|1979-11-14|1981-05-27|Leybold-Heraeus GmbH, 5000 Köln|Measuring low pressure in container - uses gas friction acting on turbo-molecular vacuum pump rotor with magnetic bearing|
    DE3019315C2|1980-05-21|1982-07-29|Kernforschungsanlage Jülich GmbH, 5170 Jülich|Gas friction vacuum gauges with a rotating body mounted in the measuring head as well as a process for the production of rotating bodies for gas friction vacuum gauges|
    EP0146647B1|1983-12-17|1987-11-04|Leybold Aktiengesellschaft|Method of processing measured values of a gas friction vacuum meter, and a gas friction vacuum meter provided with a circuit for carrying out this method|DE3716016C2|1987-05-11|1989-07-20|Physikalisch-Technische Bundesanstalt, 3300 Braunschweig, De|
    DE8908069U1|1989-07-01|1989-11-02|Leybold Ag, Zweigniederlassung Koeln, 5000 Koeln, De|
    JP2816423B2|1993-03-31|1998-10-27|工業技術院長|Rotary viscometer|
    DE4343575C2|1993-12-21|1995-10-19|Forschungszentrum Juelich Gmbh|Gas friction vacuum meter with a gas friction sensor rotating around a fixed axis of rotation|
    DE19501773A1|1994-02-01|1995-08-03|Abb Patent Gmbh|Apparatus for measuring vacuum pressure in vacuum switch chamber of electrical switchgear|
    DE4438591A1|1994-10-28|1996-05-02|Kloeckner Moeller Gmbh|Interference arcing protection system for power distribution switchgear|
    US8327713B2|2008-12-03|2012-12-11|Rosemount Inc.|Method and apparatus for pressure measurement using magnetic property|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE19843431517|DE3431517C2|1984-08-28|1984-08-28|Method for measuring pressure with a gas friction vacuum meter and a gas friction vacuum meter for carrying out the method|
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